EXCELLENT SERIES REGULATORS
for Hi-purity gases
"EXCELLENT MKII"Series for Hi-purity gases
Our“Excellent MKII" series regulators are made
by stainless-steel 316 and assembled in our Class 1000 Clean-Room.
M O D E L
EX-100MKII-G2
EX-400MKII-G2
EX-600MKII-G2
EX-4000MKII-G2
MODEL
EX-100MKII-G2
EX-400MKII-G2
EX-600MKII-G2
EX-4000MKII-G2
Inlet Pressure
210kg/cm2
210kg/cm2
30kg/cm2
10kg/cm2
Outlet Pressure
10kg/cm2
6kg/cm2
10kg/cm2
8kg/cm2
Max.Flow Rate
150NL/min.
150NL/min.
150NL/min.
5000NL/min.
Flw Coefficient(CV)
0.05
0.05
0.17
3.58
Type
Single Stage
Double Stage
Single Stage
Single Stage
Temperature
-10∼60℃
Helium Leak Rate
1x10-7 Acc/sec.
1x10-6 Acc/sec.
Surface Finish
BA
EXCELLENT SERIES REGULATORS
for Hi-purity gases
"EXCEL MEGA" Series for Super Hi-purity
gases
Our "Excellent Mega" series
regulators are made by stainless-steel 316L with Rmax.0.7μ Electric
Polished and assembled in our Class 10 Clean-Room for helium leakage
1x10-10 Acc/sec.
